Mechanics of Nanoelectromechanical Systems: Bridging the Gap Between Experiment and Theory

Nowadays, mechanical designers and engineers of elastic structures at ultra-small scales face an interesting challenge; traditional flexures with several components, mechanical joints/ welds and linkages are almost impossible to manufacture with existing microsystem fabrica‐ tion technologies. Therefore, the majority of mechanical components, elements and building blocks are based on micro/nano machined elastic flexures [1]. Despite the complexity of modeling and analyzing these systems, their design uses the averaged relation between stress and strain, which requires a relatively accurate knowledge of their effective elastic properties, specifically the effective elastic modulus. Experimental results show that the elastic properties are constant at length scales of meters down to micrometers [2]. However, in order to increase the performance, i.e. sensitivity and dynamic range, the dimensions of mechanical devices have been scaled down towards a few nanometers. Consequently, high performances such as single-electron tunneling [3], sub-attonewton force sensing [4], and sub-femtometer displace‐ ment sensing [5] have been successfully achieved. Unlike at micron and higher length scales, at sub-micron and nanometer length scales the effective elastic behavior shows strong scaledependent behavior, meaning that the elastic properties are no longer constant, but a function of length scale. For all the application examples above, the high performance was achieved due to the mechanical response of a nanosystem, which strongly depends on the effective elastic properties. Therefore, a clear understanding of the scale-dependent behavior is important for the design and performance of nanosystems.